发明申请
US20130003456A1 SCALABLE MULTI-FUNCTIONAL AND MULTI-LEVEL NANO-CRYSTAL NON-VOLATILE MEMORY DEVICE
有权
可扩展的多功能和多级纳米晶体非易失性存储器件
- 专利标题: SCALABLE MULTI-FUNCTIONAL AND MULTI-LEVEL NANO-CRYSTAL NON-VOLATILE MEMORY DEVICE
- 专利标题(中): 可扩展的多功能和多级纳米晶体非易失性存储器件
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申请号: US13608483申请日: 2012-09-10
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公开(公告)号: US20130003456A1公开(公告)日: 2013-01-03
- 发明人: Arup Bhattacharyya
- 申请人: Arup Bhattacharyya
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 主分类号: G11C16/10
- IPC分类号: G11C16/10
摘要:
A multi-functional and multi-level memory cell comprises a tunnel layer formed over a substrate. In one embodiment, the tunnel layer comprises two layers such as HfO2 and LaAlO3. A charge blocking layer is formed over the tunnel layer. In one embodiment, this layer is formed from HfSiON. A control gate is formed over the charge blocking layer. A discrete trapping layer is embedded in either the tunnel layer or the charge blocking layer, depending on the desired level of non-volatility. The closer the discrete trapping layer is formed to the substrate/insulator interface, the lower the non-volatility of the device. The discrete trapping layer is formed from nano-crystals having a uniform size and distribution.
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