发明申请
- 专利标题: Vaporization Apparatus and Method for Controlling the Same
- 专利标题(中): 蒸发装置及其控制方法
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申请号: US13520186申请日: 2010-12-24
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公开(公告)号: US20130011804A1公开(公告)日: 2013-01-10
- 发明人: Seung Cheol Seo , Doo Won Gong , Jong Ha Lee , Kyung Bum Lee , Sung Jae Jung , Whang Sin Cho
- 申请人: Seung Cheol Seo , Doo Won Gong , Jong Ha Lee , Kyung Bum Lee , Sung Jae Jung , Whang Sin Cho
- 申请人地址: KR Seoul
- 专利权人: SNU PRECISION CO., LTD
- 当前专利权人: SNU PRECISION CO., LTD
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2009-0135890 20091231
- 国际申请: PCT/KR2010/009316 WO 20101224
- 主分类号: F27D19/00
- IPC分类号: F27D19/00 ; F27B14/10
摘要:
Disclosed are a vaporization apparatus and a control method for the same. The vaporization apparatus includes a vaporization crucible adapted to receive a raw material; a vaporization heating unit adapted to vaporize the raw material by heating the vaporization crucible; a temperature measuring unit adapted to measure temperature of the vaporization crucible; a power measuring unit adapted to measure an applied power of the vaporization heating unit; and a control unit adapted to control a vaporization quantity of the raw material based on any one of a temperature variation value of the temperature measuring unit and a power variation value of the power measuring unit. The vaporization apparatus uses a non-contact/electronic method which measures a vaporization quantity through a temperature variation value and a power variation value during vaporization of a raw material. Therefore, since, differently from a contact method, a vaporization quantity measuring unit does not directly contact a raw material gas, various raw materials can be supplied and large quantity raw material supply or long time raw material supply can be achieved without deterioration of the function. In addition, preciseness of the raw material supply may be enhanced since the electronic method is capable of precise measurement of the vaporization quantity.
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