发明申请
- 专利标题: BOND LINE THICKNESS CONTROL FOR DIE ATTACHMENT
- 专利标题(中): 用于连接附件的线束厚度控制
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申请号: US13177906申请日: 2011-07-07
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公开(公告)号: US20130011941A1公开(公告)日: 2013-01-10
- 发明人: Man Wai CHAN , Shiu Kei LAM , Wan Yin YAU , Kwok Yuen CHEUNG
- 申请人: Man Wai CHAN , Shiu Kei LAM , Wan Yin YAU , Kwok Yuen CHEUNG
- 专利权人: ASM Technology Singapore Pte, Ltd.
- 当前专利权人: ASM Technology Singapore Pte, Ltd.
- 主分类号: H01L21/50
- IPC分类号: H01L21/50 ; B32B37/12
摘要:
A semiconductor die is attached onto a substrate on a process platform during manufacturing of a semiconductor package. A dispenser dispenses an adhesive onto the substrate, and the semiconductor die is bonded onto the adhesive which has been dispensed onto the substrate with a bonding tool. Thereafter, a bond line thickness between a bottom surface of the semiconductor die and a top surface of the substrate on the process platform is measured using a measuring device.
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