- 专利标题: CMOS WITH DUAL RAISED SOURCE AND DRAIN FOR NMOS AND PMOS
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申请号: US13179990申请日: 2011-07-11
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公开(公告)号: US20130015525A1公开(公告)日: 2013-01-17
- 发明人: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Balasubramanian S. Haran
- 申请人: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Balasubramanian S. Haran
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/8238
摘要:
An apparatus and a method for creating a CMOS with a dual raised source and drain for NMOS and PMOS. The spacers on both stack gates are of equal thickness. In this method, a first insulating layer is formed on the surface. The first region is then masked while the other region has the first layer etched away and has an epitaxial source and drain grown on the region. A second layer is formed to all exposed surfaces. The second region is then masked while the first region is etched away. The epitaxial source and drain is formed on the first region. The second region can also be masked by adding a thin layer of undoped silicon and then oxidize it. Another way to mask the second region is to use a hard mask. Another way to form the second source and drain is to use amorphous material.
公开/授权文献
- US09087741B2 CMOS with dual raised source and drain for NMOS and PMOS 公开/授权日:2015-07-21
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