发明申请
US20130017670A1 LASER PROCESSING METHOD AND LASER PROCESSING APPARATUS 有权
激光加工方法和激光加工设备

LASER PROCESSING METHOD AND LASER PROCESSING APPARATUS
摘要:
A laser processing method comprising a step of irradiating an object to be processed with laser light elliptically polarized with an ellipticity of other than 1 such that a light-converging point of the laser light is located within the object along the major axis of an ellipse indicative of the elliptical polarization of laser light, along a line which the object is intended to be cut, to form a modified region caused by multiphoton absorption within the object, along the line which the object is intended to be cut.
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