发明申请
US20130019679A1 INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME
有权
惯性传感器和使用其的角速度检测方法
- 专利标题： INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME
- 专利标题（中）： 惯性传感器和使用其的角速度检测方法
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申请号： US13303334申请日： 2011-11-23
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公开(公告)号： US20130019679A1公开(公告)日： 2013-01-24
- 发明人: Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
- 申请人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
- 申请人地址： KR Gyunggi-do
- 专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人地址： KR Gyunggi-do
- 优先权： KR1020110070965 20110718
- 主分类号： G01C19/56
- IPC分类号： G01C19/56
摘要：
Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.
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