Inertial sensor and angular velocity detection method using the same
    2.
    发明授权
    Inertial sensor and angular velocity detection method using the same 有权
    惯性传感器和角速度检测方法使用相同

    公开(公告)号:US08789418B2

    公开(公告)日:2014-07-29

    申请号:US13591335

    申请日:2012-08-22

    IPC分类号: G01C19/56

    CPC分类号: G01C19/574

    摘要: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

    摘要翻译: 这里公开了惯性传感器。 惯性传感器包括:多个驱动质量块; 支撑体连接连接桥,以支撑驱动块; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部,其包括驱动电极,同时驱动驱动质量,感测电极检测每个驱动质量块的轴向科里奥利力。

    Inertial sensor and angular velocity detection method using the same
    3.
    发明授权
    Inertial sensor and angular velocity detection method using the same 有权
    惯性传感器和角速度检测方法使用相同

    公开(公告)号:US08789417B2

    公开(公告)日:2014-07-29

    申请号:US13303334

    申请日:2011-11-23

    IPC分类号: G01C19/56

    摘要: Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.

    摘要翻译: 本文公开了一种惯性传感器,包括:可移动地由支撑件支撑的驱动部分; 驱动电极使所述驱动部振动; 以及检测电极,其在预定方向上检测作用在所述驱动部件上的力,其中所述驱动部件包括:位于所述惯性传感器的中心的中心驱动质量块; 连接到中心驱动质量块并且与中心驱动质量块互锁的侧驱动质量块,并且基于中心驱动质量被定位在四侧; 以及将中心驱动质量块,侧驱动块和支撑件彼此连接的连接桥。

    METHOD OF MANUFACTURING INERTIAL SENSOR
    4.
    发明申请
    METHOD OF MANUFACTURING INERTIAL SENSOR 有权
    制造传感器的方法

    公开(公告)号:US20130122189A1

    公开(公告)日:2013-05-16

    申请号:US13541279

    申请日:2012-07-03

    IPC分类号: B05D5/00

    CPC分类号: G01C19/5769 G01P15/0802

    摘要: Disclosed herein is a method of manufacturing an inertial sensor. The method includes: (A) preparing a base substrate; (B) forming a depressed first concave part in one surface of the base substrate; (C) forming a mass body in the first concave part by filling a metal or a combination of a metal and a polymer (or a polymer matrix composite) therein; and (D) forming a depressed second concave part in one surface of the base substrate at an outer side of the mass body and forming a flexible part on an upper portion of the second concave part in the base substrate. The mass body formed of the metal or the combination of the metal and the polymer (or the polymer matrix composite) has high density, thereby making it possible to improve sensitivity of the inertial sensor.

    摘要翻译: 本文公开了一种制造惯性传感器的方法。 该方法包括:(A)制备基底; (B)在基底基板的一个表面上形成凹陷的第一凹部; (C)通过在其中填充金属或金属和聚合物(或聚合物基质复合材料)的组合来在第一凹部中形成质量体; 和(D)在所述质量体的外侧形成在所述基底基板的一个表面中的凹陷的第二凹部,并且在所述基底基板的所述第二凹部的上部形成柔性部。 由金属形成的质量体或金属和聚合物(或聚合物基质复合体)的组合具有高密度,从而可以提高惯性传感器的灵敏度。

    INERTIAL SENSOR
    5.
    发明申请
    INERTIAL SENSOR 失效
    惯性传感器

    公开(公告)号:US20120297874A1

    公开(公告)日:2012-11-29

    申请号:US13213948

    申请日:2011-08-19

    IPC分类号: G01C19/56

    CPC分类号: G01C19/56

    摘要: Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.

    摘要翻译: 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110,设置在膜110的中心部分111下方并包括集成电路的质量体130,以及设置有柱140 在膜110的边缘112下方围绕质量体130,从而可以通过将集成电路包括在质量体130中来实现惯性传感器的整体厚度和面积,以实现薄而小的惯性传感器100。

    INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
    惯性传感器及其制造方法

    公开(公告)号:US20120270355A1

    公开(公告)日:2012-10-25

    申请号:US13536842

    申请日:2012-06-28

    IPC分类号: H01L21/02

    摘要: Disclosed herein is an inertial sensor, which includes a diaphragm having a piezoelectric element or a piezoresistive element formed on one surface thereof, a mass element integrated with the center of the other surface of the diaphragm in which the distal end of the mass element has a larger width than the width of the proximal end in contact with the diaphragm, and a supporter formed along the edge of the other surface of the diaphragm, so that the use of the mass element having the above shape results in decreased spring constant and increased distance from the center of the diaphragm to the center of the mass element, thereby simultaneously realizing a reduction in the size of the inertial sensor and an increase in performance thereof. A method of manufacturing the inertial sensor is also provided.

    摘要翻译: 本文公开了一种惯性传感器,其包括具有在其一个表面上形成的压电元件或压阻元件的隔膜,质量元件与隔膜的另一表面的中心一体化,质量元件的远端具有 比与隔膜接触的近端的宽度大的宽度以及沿着隔膜的另一个表面的边缘形成的支撑件,使得使用具有上述形状的质量元件导致弹簧常数降低和距离增加 从隔膜的中心到质量元件的中心,从而同时实现惯性传感器的尺寸的减小和其性能的提高。 还提供了制造惯性传感器的方法。

    PLL circuit having loop filter and method of driving the same
    9.
    发明授权
    PLL circuit having loop filter and method of driving the same 有权
    具有环路滤波器的PLL电路及其驱动方法

    公开(公告)号:US07741888B2

    公开(公告)日:2010-06-22

    申请号:US11822103

    申请日:2007-07-02

    IPC分类号: H03L7/06

    CPC分类号: H03L7/093 H03L7/10

    摘要: A PLL circuit includes a phase detector that compares the phase of an input clock and the phase of a feedback clock and generates a pull-up control signal and a pull-down control signal. A loop filter pumps a voltage in response to the pull-up and pull-down control signals, filters the pumped voltage, and outputs a control voltage. A voltage controlled oscillator receives the control signal and oscillates an output clock. A clock divider divides the frequency of the output clock at a predetermined rate to generate the feedback clock. In the PLL circuit, the loop filter includes a compensator that compensates for a variation.

    摘要翻译: PLL电路包括相位检测器,其将输入时钟的相位与反馈时钟的相位进行比较,并产生上拉控制信号和下拉控制信号。 环路滤波器根据上拉和下拉控制信号抽取电压,对泵浦电压进行滤波,并输出一个控制电压。 压控振荡器接收控制信号并振荡输出时钟。 时钟分频器以预定速率分频输出时钟的频率,以产生反馈时钟。 在PLL电路中,环路滤波器包括用于补偿变化的补偿器。