发明申请
US20130022839A1 PBNZT FERROELECTRIC FILM, SOL-GEL SOLUTION, FILM FORMING METHOD AND METHOD FOR PRODUCING FERROELECTRIC FILM
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PBNZT FERROELECTRIC FILM，SOL-GEL SOLUTION，FILM FORMING METHOD AND METHOD FOR PRODUCE FERROELECTRIC FILM
- 专利标题： PBNZT FERROELECTRIC FILM, SOL-GEL SOLUTION, FILM FORMING METHOD AND METHOD FOR PRODUCING FERROELECTRIC FILM
- 专利标题（中）： PBNZT FERROELECTRIC FILM，SOL-GEL SOLUTION，FILM FORMING METHOD AND METHOD FOR PRODUCE FERROELECTRIC FILM
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申请号： US13522824申请日： 2010-07-23
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公开(公告)号： US20130022839A1公开(公告)日： 2013-01-24
- 发明人: Takeshi Kijima , Yuuji Honda
- 申请人： Takeshi Kijima , Yuuji Honda
- 优先权： JP2010-011187 20100121
- 国际申请： PCT/JP2010/062864 WO 20100723
- 主分类号： H01L41/187
- IPC分类号： H01L41/187 ; B32B18/00 ; H01L41/22
摘要：
To provide a PBNZT ferroelectric film capable of preventing sufficiently oxygen ion deficiency. The PBNZT ferroelectric film according to an embodiment of the present invention is a ferroelectric film including a perovskite-structured ferroelectric substance represented by ABO3, wherein the perovskite-structured ferroelectric substance is a PZT-based ferroelectric substance containing Pb2+ as A-site ions and containing Zr4+ and Ti4+ as B-site ions, and the A-site contains Bi3+ as A-site compensation ions and the B-site contains Nb5+ as B-site compensation ions.
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