发明申请
- 专利标题: METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD WITH A FLOATING LEADING SHIELD
- 专利标题(中): 用浮动导线制造磁头写头的方法
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申请号: US13187355申请日: 2011-07-20
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公开(公告)号: US20130022840A1公开(公告)日: 2013-01-24
- 发明人: Wen-Chien D. Hsiao , Ning Shi , Yi Zheng
- 申请人: Wen-Chien D. Hsiao , Ning Shi , Yi Zheng
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands B. V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands B. V.
- 当前专利权人地址: NL Amsterdam
- 主分类号: G11B5/33
- IPC分类号: G11B5/33 ; C25D5/02 ; B05D5/12
摘要:
A method for manufacturing a magnetic write head having a write pole with a tapered leading edge formed on a substrate having a tapered surface and a wrap-around, trailing magnetic shield. The method uses a multi-layer anti-reflective coating prior to formation of the shield so that reflection from the tapered surface of the substrate does not affect the lithography of the mask used to form the trailing shield. The multi-layer antireflective coating is constructed of materials that can be left in the finished head, thereby eliminating problems associated with removal of the anti-reflective coating.
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