发明申请
US20130030212A1 COMPOUND HAVING ALICYCLIC STRUCTURE, (METH)ACRYLIC ACID ESTER, AND PROCESS FOR PRODUCTION OF THE (METH)ACRYLIC ACID ESTER
审中-公开
具有水性结构的化合物，（甲基）丙烯酸酯及其制备方法（甲基）丙烯酸酯
- 专利标题： COMPOUND HAVING ALICYCLIC STRUCTURE, (METH)ACRYLIC ACID ESTER, AND PROCESS FOR PRODUCTION OF THE (METH)ACRYLIC ACID ESTER
- 专利标题（中）： 具有水性结构的化合物，（甲基）丙烯酸酯及其制备方法（甲基）丙烯酸酯
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申请号： US13630978申请日： 2012-09-28
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公开(公告)号： US20130030212A1公开(公告)日： 2013-01-31
- 发明人: Shinji TANAKA , Kazuya Fukushima , Katsuki Ito , Naoya Kawano , Hideki Yamane
- 申请人： IDEMITSU KOSAN CO., LTD.
- 申请人地址： JP Tokyo
- 专利权人： IDEMITSU KOSAN CO., LTD.
- 当前专利权人： IDEMITSU KOSAN CO., LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2008-041139 20080222; JP2008-127294 20080514
- 主分类号： C07C69/604
- IPC分类号： C07C69/604 ; C07C43/196
摘要：
Provided are an alicyclic structure-containing compound, a (meth)acrylate, and a method for producing the ester. The compound and the ester are useful as a monomer and the like for a photoresist used in semiconductor manufacturing and excellent in solubility, compatibility, defect reduction, roughness improvement, and the like, realized by using an alicyclic structure-containing compound containing a linking group having an ester bond and/or a linking group having an ether bond, a (meth)acrylate derived from the alicyclic structure-containing compound, and a method for producing the ester.
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