Invention Application
- Patent Title: APPARATUS FOR COATING SUBSTRATES USING THE EB/PVD METHOD
- Patent Title (中): 用于使用EB / PVD方法涂覆基板的装置
-
Application No.: US13642086Application Date: 2011-04-20
-
Publication No.: US20130032092A1Publication Date: 2013-02-07
- Inventor: Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
- Applicant: Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
- Applicant Address: DE Hanau
- Assignee: ALD Vacuum Technologies GmbH
- Current Assignee: ALD Vacuum Technologies GmbH
- Current Assignee Address: DE Hanau
- Priority: DE102010017895.0 20100421
- International Application: PCT/DE11/00434 WO 20110420
- Main IPC: C23C16/448
- IPC: C23C16/448

Abstract:
An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.
Public/Granted literature
- US09644259B2 Apparatus for coating substrates using the EB/PVD method Public/Granted day:2017-05-09
Information query
IPC分类: