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公开(公告)号：US20130032092A1
公开(公告)日：2013-02-07
申请号：US13642086
申请日：2011-04-20
申请人： Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
发明人： Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
IPC分类号： C23C16/448
CPC分类号： C23C14/246 , C23C14/30 , H01J37/20 , H01J37/3053 , H01J2237/202 , H01J2237/3132
摘要： An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.
摘要翻译： 公开了一种用涂料涂覆基材的设备。 该装置包括框架，坩埚装置，其包括第一坩埚和在水平面上彼此偏移设置的第二坩埚，坩埚布置在框架上。 至少一个第一轴与第一坩埚相关联，并且至少一个第二轴与第二坩埚相关联，其中至少一个第一和第二轴分别设置在第一和第二坩埚下方的框架中。 第一提升装置与所述至少一个第一轴相关联，并且第二提升装置与所述至少一个第二轴相关联，其中第一和第二提升装置设置在框架中。 框架在水平面上可线性移位。
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公开(公告)号：US06689995B2
公开(公告)日：2004-02-10
申请号：US10396152
申请日：2003-03-25
IPC分类号： H05B602
CPC分类号： F01D5/286 , C21D1/42 , C21D6/04 , Y02P10/253 , Y02T50/67 , Y02T50/671
摘要： The invention relates to an apparatus and a method for heating a workpiece of an inductively heatable material, for example a turbine blade. Such a turbine blade consists of a massive blade base and a low-mass blade leaf. To enable the blade base and blade leaf to be heated in a manner appropriate to each an induction coil is provided, which surrounds the blade base and the blade leaf. By suitable choice of the alternating currents which flow through the induction coil and/or through the interposition of a susceptor between turbine blade and induction coil, the blade base and blade leaf can be heated in an appropriate manner.
摘要翻译： 本发明涉及用于加热可感应加热材料（例如涡轮叶片）的工件的装置和方法。 这种涡轮机叶片由巨大的叶片基座和低质量叶片组成。 为了能够以适合于每个感应线圈的方式来加热叶片基部和叶片叶片，该感应线圈围绕叶片基部和叶片叶片。 通过适当选择流过感应线圈的交流电流和/或通过在涡轮叶片和感应线圈之间插入基座，可以以适当的方式加热叶片基部和叶片叶片。
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公开(公告)号：US09644259B2
公开(公告)日：2017-05-09
申请号：US13642086
申请日：2011-04-20
申请人： Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
发明人： Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
IPC分类号： C23C16/00 , C23C14/24 , C23C14/30 , H01J37/20 , H01J37/305
CPC分类号： C23C14/246 , C23C14/30 , H01J37/20 , H01J37/3053 , H01J2237/202 , H01J2237/3132
摘要： An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.
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公开(公告)号：US06187160B1
公开(公告)日：2001-02-13
申请号：US09334499
申请日：1999-06-17
IPC分类号： C23C1400
CPC分类号： H01J37/3455 , H01J37/3405
摘要： An apparatus is disclosed for the coating of substrates (10) with thin films, having a vacuum chamber (1), a target (6) to be atomized, situated opposite the substrate (10) in the vacuum chamber (1), with magnets (19, 19′, 19″; 20, 20′, 20″) to produce a magnetic tunnel in front of the area of the target (6) to be atomized, an inlet (8) for a process gas into the process space (11), an anode (12), which is electrically insulated with respect to the vacuum chamber (1), and a current-voltage supply to produce a plasma in front of the target (6). The target (6) is shaped as a rotation-symmetrical body, which provides a ring-shaped enclosure around the substrate (10), wherein the magnets (19,19′, . . . ; 20,20′, . . . ) are supported on the side of the hollow cylindrical target (6), facing away from the substrate (10), and can move around the rotational axis (R) of the target (6). The substrate (10) is electrically insulated, with respect to the vacuum chamber (1), and a part of an insulator (13), configuring the anode (12), is supported on the bottom of the process space (1).
摘要翻译： 公开了一种用薄膜涂覆衬底（10）的装置，其具有真空室（1），要被雾化的靶（6），与真空室（1）中的衬底（10）相对，具有磁体 （19,19'，19“; 20,20'，20”），以在所述目标（6）的要被雾化的区域的前方产生磁通道，用于将工艺气体引入 处理空间（11），相对于真空室（1）电绝缘的阳极（12）和用于在靶（6）前方产生等离子体的电流 - 电压供应。 目标（6）成形为旋转对称的主体，其在基底（10）周围提供环形外壳，其中磁体（19,19'，... 20,20'，...） 被支撑在中空圆柱形目标（6）的背离基板（10）的一侧上，并且可以围绕目标（6）的旋转轴线（R）移动。 基板（10）相对于真空室（1）电绝缘，并且构成阳极（12）的绝缘体（13）的一部分被支撑在处理空间（1）的底部。
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公开(公告)号：US6056826A
公开(公告)日：2000-05-02
申请号：US118078
申请日：1998-07-17
申请人： Alfred Rick , Helmut Eberhardt , Friedrich Anderle , Martin Bahr
发明人： Alfred Rick , Helmut Eberhardt , Friedrich Anderle , Martin Bahr
CPC分类号： C23C14/505
摘要： A vacuum coating device coats substrates on all sides by rotating the substrates in a material flow. The device is for use in a vacuum chamber with a material source, and includes a holder for holding the substrates opposite the material source and drives correlated with the holder to bring about a rotation and shifting movement of the substrates. The device includes a hollow manipulator arm formed from three legs which extend at an angle with respect to one another. More specifically, the first leg extends at an obtuse angle with respect to the second leg, and the second leg extends at an approximately right-angle with respect to the third leg. The substrates are then held at the end of the third leg by the holder. The manipulator arm, when driven by a motor, can rotate around the longitudinal axis of the first leg, and, moreover, can move back and forth in the direction of this longitudinal axis. The holder includes a planetary gear system and substrate holders, which are made to rotate by the planetary gear system.
摘要翻译： 真空涂布装置通过在基材流中旋转基板而在所有面上涂覆基板。 该装置用于具有材料源的真空室中，并且包括用于保持与材料源相对的基板的保持器和与保持器相关的驱动以引起基板的旋转和移动。 该装置包括由相对于彼此成一定角度延伸的三个腿形成的中空的操纵臂。 更具体地，第一腿相对于第二腿以钝角延伸，并且第二腿相对于第三腿以大致直角延伸。 然后，基板通过支架固定在第三支腿的端部。 操纵器臂当由电动机驱动时可以围绕第一腿的纵向轴线旋转，并且还可以沿着该纵向轴线的方向前后移动。 保持器包括行星齿轮系和基板保持器，其被行星齿轮系转动。
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6.发明授权Apparatus for producing coils from films of insulating material, conductively coated under vacuum 失效用于从绝缘材料薄膜制造线圈的装置，在真空下导电涂覆
公开(公告)号：US4815415A
公开(公告)日：1989-03-28
申请号：US147311
申请日：1988-03-28
CPC分类号： C23C14/562 , C23C14/20 , C23C14/58 , C23C14/5826 , Y10T428/24653 , Y10T428/283
摘要： An apparatus for producing and coiling films of insulating material coated under a vacuum with electrically conductive material, comprising an electron beam vaporizer, a feed drum, a roller disposed above the electron beam vaporizer and looped by the film, a take-up drum, and deflector rolls for establishing a path for the film, at least one plasma source oriented towards the path of the film so that the plasma touches the film, said plasma source being disposed in the region of the path of the film from the electron beam vaporizer to the take-up drum, wherein the plasma source is disposed at the end of the angle of contact specified by one of the deflector rolls.
摘要翻译： 一种在真空下用导电材料制造和卷绕绝缘材料的薄膜的装置，包括电子束蒸发器，进料鼓，设置在电子束蒸发器上方并由薄膜环绕的辊，卷绕滚筒和 偏转辊，用于建立薄膜的路径，至少一个等离子体源朝向薄膜的路径定向，使得等离子体接触薄膜，所述等离子体源设置在薄膜从电子束蒸发器的路径的区域到 卷取鼓，其中等离子体源设置在由一个偏转辊指定的接触角的端部。
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7.发明授权Apparatus for producing coils from films of insulating material, conductively coated in a vacuum 失效用于在真空中导电地涂覆绝缘材料的薄膜制造线圈的装置
公开(公告)号：US4740385A
公开(公告)日：1988-04-26
申请号：US19072
申请日：1987-02-26
CPC分类号： C23C14/562 , C23C14/20 , C23C14/58 , C23C14/5826 , Y10T428/24653 , Y10T428/283
摘要： A method and apparatus are disclosed for producing rolls or coils of film of insulating material which has been conductively coated, in a vacuum, by vaporizing conductive material in direct electron beam bombardment and condensing the vapor on the film surface. According to the invention, the film is subjected to a plasma treatment after coating and before the film is wound in a coil.
摘要翻译： 公开了一种制造绝缘材料的辊或线圈的方法和装置，其已经在真空中通过在直接电子束轰击中蒸发导电材料并将蒸气冷凝在膜表面上而被导电地涂覆。 根据本发明，膜在涂覆之后并且膜被卷绕成线圈之前经受等离子体处理。
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8.发明授权
公开(公告)号：US4069143A
公开(公告)日：1978-01-17
申请号：US689861
申请日：1976-05-25
CPC分类号： C02F9/00 , B01D21/00 , B01D21/0003 , B01D21/009 , B01D21/01 , B01D21/10 , B01D21/245 , B01D21/34 , C02F1/5281
摘要： A purification apparatus for water purification with a settling device for sediment which, settling device comprises a settling vessel and a separate sediment container, which for the purification, stand open in communicative connection with each other in the assembled condition and are sealed tightly in the connection plane toward the outside by a seal, and for exchange of the sediment container are constructed moveable relative to each other. The settling vessel is supported with a roller wagon on running rails, which roller wagon has longitudinally variable supports which each comprises a telescopic tube with a spring arranged therein. A purification system includes a separation device and a collection vessel in inlet and outlet communication, respectively, with the settling vessel, the separation device including a vibrating screen, a supply line entering the settling vessel, and a purge from the collection vessel spraying water on the screen.
摘要翻译： 一种用于沉淀物的沉淀装置的净化装置，沉降装置包括沉降容器和独立的沉淀容器，其用于净化，在组装状态下彼此连通地敞开并密封在连接中 平面通过密封件朝向外部，并且用于交换沉积物容器被构造为相对于彼此可移动。 沉降容器由行走轨道上的滚子马车支撑，该滚轮具有纵向可变支撑，每个支撑件包括其中布置有弹簧的伸缩管。 净化系统包括分离装置和与沉降容器分开的入口和出口连通的分离装置和收集容器，分离装置包括振动筛，进入沉降容器的供应管线和从收集容器喷射水的吹扫 屏幕。
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公开(公告)号：US06677560B2
公开(公告)日：2004-01-13
申请号：US09778160
申请日：2001-02-06
IPC分类号： H05B610
CPC分类号： F01D5/286 , C21D1/42 , C21D6/04 , Y02P10/253 , Y02T50/67 , Y02T50/671
摘要： The invention relates to an apparatus and a method for heating a workpiece of an inductively heatable material, for example a turbine blade. Such a turbine blade consists of a massive blade base and a low-mass blade leaf. To enable the blade base and blade leaf to be heated in a manner appropriate to each an induction coil is provided, which surrounds the blade base and the blade leaf. By suitable choice of the alternating currents which flow through the induction coil and/or through the interposition of a susceptor between turbine blade and induction coil, the blade base and blade leaf can be heated in an appropriate manner.
摘要翻译： 本发明涉及用于加热可感应加热材料（例如涡轮叶片）的工件的装置和方法。 这种涡轮机叶片由巨大的叶片基座和低质量叶片组成。 为了能够以适合于每个感应线圈的方式来加热叶片基部和叶片叶片，该感应线圈围绕叶片基部和叶片叶片。 通过适当选择流过感应线圈的交流电流和/或通过在涡轮叶片和感应线圈之间插入基座，可以以适当的方式加热叶片基部和叶片叶片。
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公开(公告)号：US5044217A
公开(公告)日：1991-09-03
申请号：US170713
申请日：1988-03-21
申请人： Helmut Eberhardt
发明人： Helmut Eberhardt
IPC分类号： F16H1/14 , F16H37/06 , F16H57/021
CPC分类号： F16H37/065 , F16H1/14 , F16H57/021 , Y10T74/19088 , Y10T74/19665 , Y10T74/19688
摘要： A bevel angle drive having an input shaft with a plurality of first gears disposed at intervals thereon and a plurality of output shafts driven through second gears by the first gears and disposed radially to the input shaft. Each of the first gears has a hollow shaft. The output shafts with the second gears in the form of bevel gears are mounted each in a drive casing in which the particular first gear is journaled. The input shaft is brought in a longitudinally displaceable manner through each hollow shaft of all first gears and is joined for co-rotation to the letter by means of a driver.
摘要翻译： 一种斜角驱动器，其具有输入轴，该输入轴具有间隔设置的多个第一齿轮和多个通过第一齿轮驱动通过第二齿轮并且径向布置在输入轴上的输出轴。 每个第一齿轮具有中空轴。 具有伞形齿轮形式的第二齿轮的输出轴分别安装在其中记录特定第一档位的驱动壳体中。 输入轴通过所有第一齿轮的每个中空轴线可纵向移动，并通过驱动器连接成与该字母共同转动。
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