发明申请
US20130034951A1 METHOD OF MANUFACTURING FREE-STANDING GALLIUM NITRIDE SUBSTRATE
审中-公开
自由置换氮化镓衬底的制备方法
- 专利标题: METHOD OF MANUFACTURING FREE-STANDING GALLIUM NITRIDE SUBSTRATE
- 专利标题(中): 自由置换氮化镓衬底的制备方法
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申请号: US13559310申请日: 2012-07-26
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公开(公告)号: US20130034951A1公开(公告)日: 2013-02-07
- 发明人: JunSung Choi , Bongmo Park , Kwangje Woo , Joon Hoi Kim , Cheolmin Park
- 申请人: JunSung Choi , Bongmo Park , Kwangje Woo , Joon Hoi Kim , Cheolmin Park
- 专利权人: SAMSUNG CORNING PRECISION MATERIALS CO., LTD.
- 当前专利权人: SAMSUNG CORNING PRECISION MATERIALS CO., LTD.
- 优先权: KR10-2011-0074053 20110726
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A method of manufacturing a free-standing gallium nitride (GaN) substrate, by which a free-standing GaN substrate can be manufactured without warping or cracks. The method includes the steps of collecting polycrystalline GaN powder that is deposited in a reactor or on a susceptor in a process of growing single crystalline GaN, loading the collected polycrystalline GaN powder into a forming mold, preparing a polycrystalline GaN substrate by sintering the loaded polycrystalline GaN powder, and forming a single crystalline GaN layer by growing single crystalline GaN over the polycrystalline GaN substrate. It is possible to reduce warping and cracks that are caused, due to the difference in the coefficient of thermal expansion, during the growth or cooling of single crystalline GaN in the process of manufacturing the free-standing GaN substrate.
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