发明申请
- 专利标题: CHARGED PARTICLE RADIATION DEVICE
- 专利标题(中): 充电颗粒辐射装置
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申请号: US13521092申请日: 2010-08-11
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公开(公告)号: US20130043388A1公开(公告)日: 2013-02-21
- 发明人: Michio Hatano , Tetsuya Sawahata , Yasuko Watanabe , Mitsugu Sato , Sukehiro Ito , Takashi Ohshima , Hiroyuki Honda
- 申请人: Michio Hatano , Tetsuya Sawahata , Yasuko Watanabe , Mitsugu Sato , Sukehiro Ito , Takashi Ohshima , Hiroyuki Honda
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-036520 20090219; JP2010-014989 20100127
- 国际申请: PCT/JP10/05040 WO 20100811
- 主分类号: H01J37/26
- IPC分类号: H01J37/26
摘要:
Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.
公开/授权文献
- US09202667B2 Charged particle radiation device with bandpass detection 公开/授权日:2015-12-01
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