公开(公告)号：US20140151553A1

公开(公告)日：2014-06-05

申请号：US14235892

申请日：2012-07-04

申请人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

发明人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

IPC分类号： H01J37/06

CPC分类号： H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

摘要： A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

摘要翻译： 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。

公开(公告)号：US08629395B2

公开(公告)日：2014-01-14

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/22

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US20100090109A1

公开(公告)日：2010-04-15

申请号：US12415907

申请日：2009-03-31

申请人： Michio HATANO ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

发明人： Michio HATANO ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

IPC分类号： G01N23/225

CPC分类号： H01J37/256 ,  H01J37/244 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/2605 ,  H01J2237/2806

摘要： A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

摘要翻译： 扫描电子显微镜包括用于向样品照射电子束的照射光学系统; 用于支撑样品的样品保持器，布置在样品室内部; 至少一个电场供给电极，布置在所述样品保持器周围; 和离子电流检测电极。

公开(公告)号：US20090230304A1

公开(公告)日：2009-09-17

申请号：US12396593

申请日：2009-03-03

申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

IPC分类号： G01N23/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

公开(公告)号：US07511271B2

公开(公告)日：2009-03-31

申请号：US11230642

申请日：2005-09-21

申请人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

发明人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

IPC分类号： H01J47/00

CPC分类号： H01J37/256 ,  H01J37/244 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/2605 ,  H01J2237/2806

摘要： A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

摘要翻译： 扫描电子显微镜包括用于向样品照射电子束的照射光学系统; 用于支撑样品的样品保持器，布置在样品室内; 至少一个电场供给电极，布置在所述样品保持器周围; 和离子电流检测电极。

公开(公告)号：US20050127294A1

公开(公告)日：2005-06-16

申请号：US11006556

申请日：2004-12-08

申请人： Junichi Katane ,  Sukehiro Ito

发明人： Junichi Katane ,  Sukehiro Ito

IPC分类号： H01J37/244 ,  G01N23/00 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/2448 ,  H01J2237/2449

摘要： A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.

摘要翻译： 公开了一种扫描电子显微镜，其中从样品产生的二次电子被二次电子检测器有效地捕获，通过校正和控制二次电子的轨迹。 在物镜下方的一次电子束的放射孔附近配置有数十〜数十伏的负电位的第一辅助电极，并且在侧面配置施加正电压的第二辅助电极 的第二辅助电极，从而校正和控制二次电子的轨迹。 此外，在二次电子检测器的前表面上布置有用于辅助捕获从试样产生的二次电子的第三辅助电极。

公开(公告)号：US09543111B2

公开(公告)日：2017-01-10

申请号：US13982805

申请日：2011-11-02

申请人： Yusuke Ominami ,  Sukehiro Ito ,  Masami Katsuyama

发明人： Yusuke Ominami ,  Sukehiro Ito ,  Masami Katsuyama

IPC分类号： H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26

CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/2608 ,  H01J2237/2811

摘要： Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere.A charged particle beam device that adopts a thin film which partitions a vacuum atmosphere and the air atmosphere (or gaseous atmosphere) includes a charged particle optical lens barrel in which a charged particle optical system is stored, a housing in which a route along which a primary charged particle beam emitted from the charged particle optical lens barrel reaches the thin film is sustained in the vacuum atmosphere, and a mechanism that bears the charged particle optical lens barrel and first housing against a device installation surface. As the bearing mechanism, a housing having an opening through which a large-sized specimen is carried in or a mechanism having a shape other than the shape of the housing, such as, a post is adopted.

摘要翻译： 采用分隔真空气氛的薄膜和空气气氛（或气体气氛）的带电粒子束装置包括其中存储带电粒子光学系统的带电粒子光学镜筒，其中沿着 从带电粒子光学透镜镜筒发射的到达薄膜的初级带电粒子束在真空气氛中被维持，并且使得带电粒子光学镜片镜筒和第一壳体抵抗装置安装​​表面的机构。 作为轴承机构，采用具有大尺寸样本的开口的壳体或具有除壳体的形状以外的形状的机构，例如柱。

公开(公告)号：US09029766B2

公开(公告)日：2015-05-12

申请号：US14241121

申请日：2012-05-28

申请人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

发明人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/04

CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

摘要： To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (29), an aperture (26), a sample table (3), an electron optical system (4-1) for making an electron beam (31) converge on a sample (2), a deflection means (10), a secondary electron detector (8), a reflected electron detector (9), and a cylindrical electron transport means (5) in a position between the electron gun (29) and sample (2). The reflected electron detector (9) is provided within the electron transport means (5) and on a side further away from the electron gun (29) than the secondary electron detector (8) and the deflection means (10). The reception surface (9-1) of the reflected electron detector (9) is electrically wired so as to have the same potential as the electron transport means (5).

摘要翻译： 为了提供即使在低探针电流下能够区分和检测反射电子和二次电子的低加速度扫描电子显微镜，该扫描电子显微镜设置有电子枪（29），孔（26），样品台（3 ），用于使电子束（31）会聚在样品（2）上的电子光学系统（4-1），偏转装置（10），二次电子检测器（8），反射电子检测器（9） 以及在电子枪（29）和样品（2）之间的位置的圆柱形电子传输装置（5）。 反射电子检测器（9）设置在电子传输装置（5）内并且比二次电子检测器（8）和偏转装置（10）更远离电子枪（29）的一侧。 反射电子检测器（9）的接收表面（9-1）被电连接以具有与电子传输装置（5）相同的电位。

公开(公告)号：US20140246583A1

公开(公告)日：2014-09-04

申请号：US14349630

申请日：2012-09-03

申请人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

发明人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

摘要： Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.

摘要翻译： 提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。 具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间， 能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴， 粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。

公开(公告)号：US08809782B2

公开(公告)日：2014-08-19

申请号：US13387424

申请日：2010-07-20

申请人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

发明人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

IPC分类号： H01J37/00 ,  H01J37/16 ,  F16F15/04 ,  H01J37/28

CPC分类号： H01J37/28 ,  F16F15/04 ,  H01J37/16 ,  H01J2237/0216

摘要： A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

摘要翻译： 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元，主扫描电子显微镜单元上的控制器，容纳主扫描电子显微镜单元和控制器的单个壳体，底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上，在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔，并且阻尼器固定到底面 的主扫描电子显微镜单元，并且通过第一开孔设置。