发明申请
- 专利标题: LATERAL HIGH-VOLTAGE TRANSISTOR AND ASSOCIATED METHOD FOR MANUFACTURING
- 专利标题(中): 横向高压晶体管及相关制造方法
-
申请号: US13212097申请日: 2011-08-17
-
公开(公告)号: US20130043532A1公开(公告)日: 2013-02-21
- 发明人: Donald R. Disney , Ognjen Milic
- 申请人: Donald R. Disney , Ognjen Milic
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/336
摘要:
The present disclosure discloses a lateral high-voltage transistor and associated method for making the same. The lateral high-voltage transistor comprises a semiconductor layer of a first conductivity type; a source region of a second conductivity type opposite to the first conductivity type in the semiconductor layer; a drain region of the second conductivity type in the semiconductor layer separated from the source region; a first isolation layer atop the semiconductor layer between the source region and the drain region; a first well region of the second conductivity type surrounding the drain region, extending towards the source region and separated from the source region; a second well region of the first conductivity type surrounding the source region; a gate positioned atop the first isolation layer above the second well region and an adjacent portion of the first well region; and a first buried layer of the first conductivity type under the first well region adjacent to the source region side of the lateral high-voltage transistor. A JFET is formed using the gate as a JFET top gate and the first buried layer as a JFET bottom gate.
公开/授权文献
信息查询
IPC分类: