发明申请
- 专利标题: HIGH DENSITY LATERAL DMOS AND ASSOCIATED METHOD FOR MAKING
- 专利标题(中): 高密度横向DMOS及相关方法制作
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申请号: US13213011申请日: 2011-08-18
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公开(公告)号: US20130043534A1公开(公告)日: 2013-02-21
- 发明人: Donald R. Disney , Lei Zhang , Tiesheng Li
- 申请人: Donald R. Disney , Lei Zhang , Tiesheng Li
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/336
摘要:
The present disclosure discloses a lateral DMOS with recessed source contact and method for making the same. The lateral DMOS comprises a recessed source contact which has a portion recessed into a source region to reach a body region of the lateral DMOS. The lateral DMOS according to various embodiments of the present invention may have greatly reduced size and may be cost saving for fabrication.
公开/授权文献
- US08546879B2 High density lateral DMOS with recessed source contact 公开/授权日:2013-10-01
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