发明申请
- 专利标题: SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件结构及其制造方法
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申请号: US13375692申请日: 2011-08-29
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公开(公告)号: US20130049125A1公开(公告)日: 2013-02-28
- 发明人: Huicai Zhong , Jun Luo , Qingqing Liang , Huilong Zhu
- 申请人: Huicai Zhong , Jun Luo , Qingqing Liang , Huilong Zhu
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 优先权: CN201110240932.X 20110822
- 国际申请: PCT/CN2011/079040 WO 20110829
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/283
摘要:
A semiconductor device structure and a method for manufacturing the same are disclosed. In one embodiment, the method comprises: forming a fin in a first direction on a semiconductor substrate; forming a gate line in a second direction crossing the first direction on the semiconductor substrate, the gate line intersecting the fin via a gate dielectric layer; forming a dielectric spacer surrounding the gate line; forming a conductive spacer surrounding the dielectric spacer; and performing inter-device electrical isolation at a predetermined region, wherein isolated portions of the gate line form gate electrodes of respective unit devices, and isolated portions of the conductive spacer form contacts of the respective unit devices.
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