发明申请
- 专利标题： IMAGING OPTICSIIMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVING SAME AND RELATED METHODS
- 专利标题（中）： 成像光学光学，具有相同方法的微结构投影曝光装置
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申请号： US13602553申请日： 2012-09-04
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公开(公告)号： US20130050671A1公开(公告)日： 2013-02-28
- 发明人: Hans-Juergen Mann , David Shafer
- 申请人： Hans-Juergen Mann , David Shafer
- 申请人地址： DE Oberkochen
- 专利权人： CARL ZEISS SMT GMBH
- 当前专利权人： CARL ZEISS SMT GMBH
- 当前专利权人地址： DE Oberkochen
- 主分类号： G03B27/54
- IPC分类号： G03B27/54 ; G02B17/06
摘要：
An imaging optics has a plurality of mirrors to image an object field in an object plane into an image field in an image plane. The imaging optics includes a first partial objective to image the object field onto an intermediate image, and the imaging optics includes a second partial objective to image the intermediate image onto the image field. The second partial objective includes a penultimate mirror in the beam path of imaging light between the object field and the image field, and the second partial objective includes a last mirror in the beam path. The penultimate mirror images the intermediate image onto a further intermediate image, and the last mirror images the further intermediate image onto the image field.
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