发明申请
- 专利标题: Normal Incidence Broadband Spectroscopic Polarimeter and Optical Measurement System
- 专利标题(中): 正常发生宽带光谱偏振仪和光学测量系统
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申请号: US13696054申请日: 2011-06-01
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公开(公告)号: US20130050702A1公开(公告)日: 2013-02-28
- 发明人: Guoguang Li , Tao Liu , Edgar Genio , Tiezhong Ma , Xiaolang Yan
- 申请人: Guoguang Li , Tao Liu , Edgar Genio , Tiezhong Ma , Xiaolang Yan
- 申请人地址: CN BEIJING
- 专利权人: BEIOPTICS TECHNOLOGY CO., LTD
- 当前专利权人: BEIOPTICS TECHNOLOGY CO., LTD
- 当前专利权人地址: CN BEIJING
- 优先权: CN201010199230.7 20100602
- 国际申请: PCT/CN11/00927 WO 20110601
- 主分类号: G01J3/447
- IPC分类号: G01J3/447
摘要:
A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.
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