Invention Application
- Patent Title: PLATING CUP WITH CONTOURED CUP BOTTOM
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Application No.: US13609037Application Date: 2012-09-10
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Publication No.: US20130062197A1Publication Date: 2013-03-14
- Inventor: Zhian He , Jingbin Feng , Shantinath Ghongadi , Frederick D. Wilmot
- Applicant: Zhian He , Jingbin Feng , Shantinath Ghongadi , Frederick D. Wilmot
- Main IPC: C25D17/06
- IPC: C25D17/06

Abstract:
Disclosed herein are cups for engaging wafers during electroplating in clamshell assemblies and supplying electrical current to the wafers during electroplating. The cup can comprise an elastomeric seal disposed on the cup and configured to engage the wafer during electroplating, where upon engagement the elastomeric seal substantially excludes plating solution from a peripheral region of the wafer, and where the elastomeric seal and the cup are annular in shape, and comprise one or more contact elements for supplying electrical current to the wafer during electroplating, the one or more contact elements attached to and extending inwardly towards a center of the cup from a metal strip disposed over the elastomeric seal. A notch area of the cup can have a protrusion or an insulated portion on a portion of a bottom surface of the cup where the notch area is aligned with a notch in the wafer.
Public/Granted literature
- US09512538B2 Plating cup with contoured cup bottom Public/Granted day:2016-12-06
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