发明申请
US20130062718A1 BACK-SURFACE-INCIDENCE-TYPE SEMICONDUCTOR LIGHT RECEIVING ELEMENT 失效
背面辐射型半导体光接收元件

BACK-SURFACE-INCIDENCE-TYPE SEMICONDUCTOR LIGHT RECEIVING ELEMENT
摘要:
A back-surface-incidence semiconductor light element includes: a semiconductor substrate of a first conductivity type; a first semiconductor layer of a first conductivity type on the semiconductor substrate; a light absorbing layer on the first semiconductor layer; a second semiconductor layer on the light absorbing layer; and an impurity diffusion region of a second conductivity type in a portion of the second semiconductor layer. A region including a p-n junction between the first semiconductor layer and the impurity diffusion region, and extending through the light absorbing layer, is a light detecting portion that detects light incident on a back surface of the semiconductor substrate. A groove in the back surface of the semiconductor substrate surrounds the light detecting portion, as viewed in plan.
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