发明申请
- 专利标题: BACK-SURFACE-INCIDENCE-TYPE SEMICONDUCTOR LIGHT RECEIVING ELEMENT
- 专利标题(中): 背面辐射型半导体光接收元件
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申请号: US13477128申请日: 2012-05-22
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公开(公告)号: US20130062718A1公开(公告)日: 2013-03-14
- 发明人: Hitoshi TADA , Yasuo NAKAJIMA , Yasuhiro KUNITSUGU
- 申请人: Hitoshi TADA , Yasuo NAKAJIMA , Yasuhiro KUNITSUGU
- 申请人地址: JP Tokyo
- 专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-196694 20110909
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232
摘要:
A back-surface-incidence semiconductor light element includes: a semiconductor substrate of a first conductivity type; a first semiconductor layer of a first conductivity type on the semiconductor substrate; a light absorbing layer on the first semiconductor layer; a second semiconductor layer on the light absorbing layer; and an impurity diffusion region of a second conductivity type in a portion of the second semiconductor layer. A region including a p-n junction between the first semiconductor layer and the impurity diffusion region, and extending through the light absorbing layer, is a light detecting portion that detects light incident on a back surface of the semiconductor substrate. A groove in the back surface of the semiconductor substrate surrounds the light detecting portion, as viewed in plan.
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