Invention Application
US20130065472A1 DEFECT DETECTION METHOD OF DISPLAY DEVICE AND DEFECT DETECTION APPARATUS OF DISPLAY DEVICE
有权
显示装置的缺陷检测方法和显示装置的缺陷检测装置
- Patent Title: DEFECT DETECTION METHOD OF DISPLAY DEVICE AND DEFECT DETECTION APPARATUS OF DISPLAY DEVICE
- Patent Title (中): 显示装置的缺陷检测方法和显示装置的缺陷检测装置
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Application No.: US13627528Application Date: 2012-09-26
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Publication No.: US20130065472A1Publication Date: 2013-03-14
- Inventor: Kei NARA , Tomohide HAMADA
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2007-261481 20071005
- Main IPC: H01J9/42
- IPC: H01J9/42 ; G01N37/00 ; G06F19/00 ; H01J9/50

Abstract:
A defect detecting method of a display device includes a defect counting process that measuring a feature amount for each partial region of a display device (P32), and counting regions which is determined as a defective portion based on the measured feature amount of the region (P36), a process that stopping a manufacturing line of the display device when a number of defects counted at the defect counting process is greater than a first threshold value (P38, P42), a defect density calculating process that calculating a defect density in a predetermined area when the number of defects counted at the defect counting process is smaller than the first threshold value (P38), and a process that stopping the manufacturing line of the display device when the defect density calculated at the defect density calculating process is higher than a second threshold value (P40, P42).
Public/Granted literature
- US08926387B2 Defect detection method of display device and defect detection apparatus of display device Public/Granted day:2015-01-06
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