发明申请
- 专利标题： SENSOR ELEMENT WITH ENGINEERED SILICIDE
- 专利标题（中）： 传感器元件与工程硅胶
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申请号： US13235261申请日： 2011-09-16
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公开(公告)号： US20130068013A1公开(公告)日： 2013-03-21
- 发明人: Scott Edward Beck , Yong-Fa Wang
- 申请人： Scott Edward Beck , Yong-Fa Wang
- 申请人地址： US NJ Morristown
- 专利权人： HONEYWELL INTERNATIONAL INC.
- 当前专利权人： HONEYWELL INTERNATIONAL INC.
- 当前专利权人地址： US NJ Morristown
- 主分类号： G01F1/69
- IPC分类号： G01F1/69 ; G01F1/68 ; G01F1/00 ; H01L21/02
摘要：
A sensing element having an integrally formed metal-silicide layer with a silicon layer is described. In some instances, the thickness of the metal-silicide layer can be controlled during fabrication such that the sensing element has a desired resistivity and/or a near linear thermal coefficient of resistance (TCR).
公开/授权文献
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