Invention Application
- Patent Title: MICRO ELECTRO MECHANICAL SYSTEMS COMPONENT
- Patent Title (中): 微电子机械系统组件
-
Application No.: US13324918Application Date: 2011-12-13
-
Publication No.: US20130068022A1Publication Date: 2013-03-21
- Inventor: WON KYU JEUNG , JONG WOON KIM , HEUNG WOO PARK
- Applicant: WON KYU JEUNG , JONG WOON KIM , HEUNG WOO PARK
- Applicant Address: KR GYUNGGI-DO
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR GYUNGGI-DO
- Priority: KR1020110092898 20110915
- Main IPC: G01P15/097
- IPC: G01P15/097 ; H03B5/30 ; G01L11/00

Abstract:
Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane 110; a post 130 disposed under an edge 115 of the membrane 110; a stopper 140 disposed under the membrane 110 and disposed more inwardly than the post 130 so as to form a space 143 between the stopper 140 and the post 130; and a cap 150 disposed under the post 130 so as to cover the post 130, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined region 145 of the membrane 110 disposed above the space 143.
Public/Granted literature
- US08607638B2 Micro electro mechanical systems component Public/Granted day:2013-12-17
Information query
IPC分类: