发明申请
- 专利标题: METHOD OF PRODUCING POROUS GLASS
- 专利标题(中): 生产多孔玻璃的方法
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申请号: US13700068申请日: 2011-05-20
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公开(公告)号: US20130068725A1公开(公告)日: 2013-03-21
- 发明人: Kenji Takashima , Zuyi Zhang , Yoshinori Kotani
- 申请人: Kenji Takashima , Zuyi Zhang , Yoshinori Kotani
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-126329 20100601
- 国际申请: PCT/JP2011/062151 WO 20110520
- 主分类号: C03C15/00
- IPC分类号: C03C15/00
摘要:
Provided is a method of producing a porous glass, including selectively etching a phase-separated glass with an acid solution, in which the method allows a processing time to be shortened and suppresses gel-like silica from remaining and being deposited in pores of a porous portion. The method of producing a porous glass includes: immersing the phase-separated glass in a bath containing an acid solution; setting an angle θ, which is formed by a surface to be porosified of the phase-separated glass and a bath liquid surface, to 10° or more to 90° or less; and irradiating the bath with an ultrasonic wave to etch the phase-separated glass, thereby obtaining the porous glass.
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