发明申请
- 专利标题: METHOD FOR PRODUCING A PLURALITY OF OPTOELECTRONIC SEMICONDUCTOR CHIPS
- 专利标题(中): 用于生产多光子半导体晶体管的方法
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申请号: US13580491申请日: 2011-02-03
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公开(公告)号: US20130069086A1公开(公告)日: 2013-03-21
- 发明人: Ewald K. M. Günther , Mathias Kämpf , Jens Dennemarck , Nikolaus Gmeinwieser
- 申请人: Ewald K. M. Günther , Mathias Kämpf , Jens Dennemarck , Nikolaus Gmeinwieser
- 申请人地址: DE Regensburg
- 专利权人: OSRAM OPTO SEMICONDUCTORS GMBH
- 当前专利权人: OSRAM OPTO SEMICONDUCTORS GMBH
- 当前专利权人地址: DE Regensburg
- 优先权: DE102010009015.8 20100224
- 国际申请: PCT/EP11/51574 WO 20110203
- 主分类号: H01L33/08
- IPC分类号: H01L33/08
摘要:
A method for producing a plurality of optoelectronic semiconductor chips includes providing a carrier wafer having a first surface and a second surface opposite the first surface. wherein a plurality of individual component layer sequences spaced apart from one another in a lateral direction are applied on the first surface, the component layer sequences being separated from one another by separation trenches; introducing at least one crystal imperfection in at least one region of the carrier wafer which at least partly overlaps a separation trench in a vertical direction; singulating the carrier wafer along the at least one crystal imperfection into individual semiconductor.
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