发明申请
- 专利标题: SEMICONDUCTOR STORAGE DEVICE
- 专利标题(中): 半导体存储设备
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申请号: US13606472申请日: 2012-09-07
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公开(公告)号: US20130069132A1公开(公告)日: 2013-03-21
- 发明人: Tomoaki Atsumi , Takashi Okuda
- 申请人: Tomoaki Atsumi , Takashi Okuda
- 申请人地址: JP Atsugi-shi
- 专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人地址: JP Atsugi-shi
- 优先权: JP2011-205581 20110921; JP2011-225514 20111013
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L23/485
摘要:
Probability of malfunction of a semiconductor storage device is reduced. A shielding layer is provided between a memory cell array (e.g., a memory cell array including a transistor formed using an oxide semiconductor material) and a peripheral circuit (e.g., a peripheral circuit including a transistor formed using a semiconductor substrate), which are stacked. With this structure, the memory cell array and the peripheral circuit can be shielded from radiation noise generated between the memory cell array and the peripheral circuit. Thus, probability of malfunction of the semiconductor storage device can be reduced.
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