发明申请
US20130079913A1 METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL PROCESSING MANAGEMENT
审中-公开
用于本地加工管理的半导体制造的方法和系统
- 专利标题： METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL PROCESSING MANAGEMENT
- 专利标题（中）： 用于本地加工管理的半导体制造的方法和系统
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申请号： US13247792申请日： 2011-09-28
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公开(公告)号： US20130079913A1公开(公告)日： 2013-03-28
- 发明人: Chinmay S. Oza , William J. Fosnight , Jan Rothe , John R. Robinson , Gabriel Gaxiola
- 申请人： Chinmay S. Oza , William J. Fosnight , Jan Rothe , John R. Robinson , Gabriel Gaxiola
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人地址： KY Grand Cayman
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit based on the processing data.
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