Invention Application
- Patent Title: CORROSION RESISTANT MEMBER AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 耐腐蚀成员及其制造方法
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Application No.: US13607257Application Date: 2012-09-07
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Publication No.: US20130084450A1Publication Date: 2013-04-04
- Inventor: Yukitaka MURATA , Hitoshi SASAKI , Shintaro MATSUMOTO
- Applicant: Yukitaka MURATA , Hitoshi SASAKI , Shintaro MATSUMOTO
- Applicant Address: JP Tokyo
- Assignee: Covalent Materials Corporation
- Current Assignee: Covalent Materials Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2011-217772 20110930
- Main IPC: B32B3/26
- IPC: B32B3/26 ; B32B18/00 ; C23C4/10 ; B32B15/04
Abstract:
The present invention relates to a corrosion resistant member including: a substrate composed of a ceramic or a metal, and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas, in which the corrosion resistant film contains yttria as a main component and further also contains at least one of tantalum and niobium in an amount of 0.02 to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film.
Information query
