发明申请
- 专利标题: HEAT SHIELD LINER IN A PHASE CHANGE MEMORY CELL
- 专利标题(中): 相变存储器中的热屏蔽线
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申请号: US13268151申请日: 2011-10-07
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公开(公告)号: US20130087756A1公开(公告)日: 2013-04-11
- 发明人: Eric A. Joseph , Chung H. Lam , Son V. Nguyen , Alejandro G. Schrott
- 申请人: Eric A. Joseph , Chung H. Lam , Son V. Nguyen , Alejandro G. Schrott
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/02
摘要:
A memory cell structure and method to form such structure. An example memory cell includes a bottom electrode formed within a substrate. The memory cell also includes a phase change memory element in contact with the bottom electrode. The memory cell includes a liner laterally surrounding the phase change memory element. The liner includes dielectric material that is thermally conductive and electrically insulating. The memory cell includes an insulating dielectric layer laterally surrounding the liner. The insulating dielectric layer includes material having a lower thermal conductivity than that of the liner.
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