Invention Application
- Patent Title: PHOTORESIST COMPOSITION AND RESIST PATTERN-FORMING METHOD
- Patent Title (中): 光电组合物和电阻形成方法
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Application No.: US13644708Application Date: 2012-10-04
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Publication No.: US20130089817A1Publication Date: 2013-04-11
- Inventor: Hiromu MIYATA , Hiromitsu NAKASHIMA , Masafumi YOSHIDA
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2011-222429 20111007; JP2012-068362 20120323
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/20

Abstract:
A photoresist composition includes a polymer that includes a first structural unit shown by a formula (1), and an acid generator. R1 represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group. R2 represents a divalent hydrocarbon group having 1 to 10 carbon atoms. A represents —COO—*, —OCO—*, —O—, —S—, or —NH—, wherein “*” indicates a site bonded to R3. R3 represents a single bond or a divalent hydrocarbon group having 1 to 10 carbon atoms. The polymer preferably further includes a second structural unit that includes an acid-labile group.
Public/Granted literature
- US09268219B2 Photoresist composition and resist pattern-forming method Public/Granted day:2016-02-23
Information query
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