Invention Application
US20130089817A1 PHOTORESIST COMPOSITION AND RESIST PATTERN-FORMING METHOD 有权
光电组合物和电阻形成方法

PHOTORESIST COMPOSITION AND RESIST PATTERN-FORMING METHOD
Abstract:
A photoresist composition includes a polymer that includes a first structural unit shown by a formula (1), and an acid generator. R1 represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group. R2 represents a divalent hydrocarbon group having 1 to 10 carbon atoms. A represents —COO—*, —OCO—*, —O—, —S—, or —NH—, wherein “*” indicates a site bonded to R3. R3 represents a single bond or a divalent hydrocarbon group having 1 to 10 carbon atoms. The polymer preferably further includes a second structural unit that includes an acid-labile group.
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