发明申请
- 专利标题: Three-Dimensional Vertical Interconnecting Structure and Manufacturing Method Thereof
- 专利标题(中): 三维垂直互连结构及其制造方法
-
申请号: US13806136申请日: 2011-08-05
-
公开(公告)号: US20130093091A1公开(公告)日: 2013-04-18
- 发明人: Shenglin Ma , Yunhui Zhu , Xin Sun , Yufeng Jin , Min Miao
- 申请人: Shenglin Ma , Yunhui Zhu , Xin Sun , Yufeng Jin , Min Miao
- 申请人地址: CN Beijing
- 专利权人: PEKING UNIVERSITY
- 当前专利权人: PEKING UNIVERSITY
- 当前专利权人地址: CN Beijing
- 优先权: CN201010513047.X 20101012
- 国际申请: PCT/CN11/01288 WO 20110805
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L21/50
摘要:
The present invention discloses a three-dimensional vertically interconnected structure and a fabricating method for the same. The structure comprises at least two layers of chips which are stacked in sequence or stacked together face to face, and an adhesive material is used for adhesion between adjacent layers of said chips, each layer of chips contains a substrate layer and a dielectric layer sequentially bottom to top; an front surface of the chip has a first concave with an annular cross section, and the first concave is filled with metal inside to form a first electrical conductive ring connecting to microelectronic devices inside the chip via a redistribution layer; a first through layers of chips hole having the same radius and center as inner ring of the first electrical conductive ring penetrates the stacked chips and has a first micro electrical conductive pole inside that is electrically connected to the first electrical conductive ring. The three-dimensional vertically interconnected structure of the present invention enhances the strength of the electric interconnection and the adhesion between adjacent layers of chips, and in the meantime the disclosed fabricating method simplifies the process difficulty and therefore improves the yield.
公开/授权文献
- US08836140B2 Three-dimensional vertically interconnected structure 公开/授权日:2014-09-16
信息查询
IPC分类: