发明申请
US20130098141A1 LOCALIZED DEPOSITION OF POLYMER FILM ON NANOCANTILEVER CHEMICAL VAPOR SENSORS BY SURFACE-INITIATED ATOM TRANSFER RADICAL POLYMERIZATION
有权
通过表面引发的原子转移自由基聚合在聚合物膜上定位沉积在纳米化学气相传感器上
- 专利标题: LOCALIZED DEPOSITION OF POLYMER FILM ON NANOCANTILEVER CHEMICAL VAPOR SENSORS BY SURFACE-INITIATED ATOM TRANSFER RADICAL POLYMERIZATION
- 专利标题(中): 通过表面引发的原子转移自由基聚合在聚合物膜上定位沉积在纳米化学气相传感器上
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申请号: US13419510申请日: 2012-03-14
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公开(公告)号: US20130098141A1公开(公告)日: 2013-04-25
- 发明人: Heather McCaig , Edward B. Myers , Michael L. Roukes , Nathan S. Lewis , Derrick Chi
- 申请人: Heather McCaig , Edward B. Myers , Michael L. Roukes , Nathan S. Lewis , Derrick Chi
- 申请人地址: US CA Pasadena
- 专利权人: California Institute of Technology
- 当前专利权人: California Institute of Technology
- 当前专利权人地址: US CA Pasadena
- 主分类号: G01N33/00
- IPC分类号: G01N33/00
摘要:
Cantilever chemical vapor sensors that can be tailored to respond preferentially in frequency by controlling the location of deposition of an adsorbing layer. Cantilever chemical vapor sensor having a base, one or more legs and a tip are fabricated using a gold layer to promote deposition of a sorbing layer of a polymeric material in a desired location, and using a chromium layer to inhibit deposition of the sorbing layer in other locations. Sorbing layers having different glass temperatures Tg and their effects are described. The methods of making such cantilever chemical vapor sensors are described.
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