LOCALIZED DEPOSITION OF POLYMER FILM ON NANOCANTILEVER CHEMICAL VAPOR SENSORS BY SURFACE-INITIATED ATOM TRANSFER RADICAL POLYMERIZATION
    2.
    发明申请
    LOCALIZED DEPOSITION OF POLYMER FILM ON NANOCANTILEVER CHEMICAL VAPOR SENSORS BY SURFACE-INITIATED ATOM TRANSFER RADICAL POLYMERIZATION 有权
    通过表面引发的原子转移自由基聚合在聚合物膜上定位沉积在纳米化学气相传感器上

    公开(公告)号:US20130098141A1

    公开(公告)日:2013-04-25

    申请号:US13419510

    申请日:2012-03-14

    IPC分类号: G01N33/00

    摘要: Cantilever chemical vapor sensors that can be tailored to respond preferentially in frequency by controlling the location of deposition of an adsorbing layer. Cantilever chemical vapor sensor having a base, one or more legs and a tip are fabricated using a gold layer to promote deposition of a sorbing layer of a polymeric material in a desired location, and using a chromium layer to inhibit deposition of the sorbing layer in other locations. Sorbing layers having different glass temperatures Tg and their effects are described. The methods of making such cantilever chemical vapor sensors are described.

    摘要翻译: 悬臂式化学气相传感器可通过控制吸附层沉积的位置而定制成优先的频率响应。 使用金层制造具有基座,一个或多个腿部和尖端的悬臂式化学气相传感器,以促进将聚合物材料的吸附层沉积在期望的位置,并且使用铬层抑制吸附层的沉积 其他地点。 描述了具有不同玻璃温度Tg的吸附层及其效果。 描述制造这种悬臂式化学气相传感器的方法。