发明申请
- 专利标题: CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER
- 专利标题(中): 具有智能控制器的可定制开发系统
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申请号: US13805601申请日: 2011-06-27
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公开(公告)号: US20130101438A1公开(公告)日: 2013-04-25
- 发明人: James Cedrone , Iraj Gashgaee , Paul J. Magoon , Jennifer M. Braggin , George L. Gonnella , Johnathan Owen Vail
- 申请人: James Cedrone , Iraj Gashgaee , Paul J. Magoon , Jennifer M. Braggin , George L. Gonnella , Johnathan Owen Vail
- 申请人地址: US MA Billerica
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MA Billerica
- 国际申请: PCT/US11/42018 WO 20110627
- 主分类号: F04B49/06
- IPC分类号: F04B49/06 ; F04B49/00
摘要:
Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The switching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
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