发明申请
- 专利标题： Sample Block Holder
- 专利标题（中）： 样品块支架
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申请号： US13284729申请日： 2011-10-28
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公开(公告)号： US20130105677A1公开(公告)日： 2013-05-02
- 发明人: Matthew Barrett , Michael D. Smith , Michal Geryk , Paul Scagnetti , Richard Tovey
- 申请人： Matthew Barrett , Michael D. Smith , Michal Geryk , Paul Scagnetti , Richard Tovey
- 申请人地址： US OR Hillsboro
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： US OR Hillsboro
- 主分类号： H01J37/28
- IPC分类号： H01J37/28 ; H01J37/16
摘要：
A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
公开/授权文献
- US08624199B2 Sample block holder 公开/授权日：2014-01-07
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