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公开(公告)号：US08624199B2
公开(公告)日：2014-01-07
申请号：US13284729
申请日：2011-10-28
CPC分类号： H01J37/20 , G01N2223/307 , G01N2223/418 , G01N2223/616 , H01J37/16 , H01J2237/2007 , H01J2237/201 , H01J2237/28 , H01J2237/2826
摘要： A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
摘要翻译： 样品架组件包括样品托盘，基板，载物台和安装在载物台上的校准标准品。 底板底部的三个配合结构与安装在扫描电镜样品台上的台架上的相应结构配合。 可选的接触导体提供台架和基板之间的电接触，使得通过电子束在样品上产生的电荷可以使样品通过样品导电层到样品托盘，到基板，到载物台， 并通过接地阶段。
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公开(公告)号：US20130105677A1
公开(公告)日：2013-05-02
申请号：US13284729
申请日：2011-10-28
CPC分类号： H01J37/20 , G01N2223/307 , G01N2223/418 , G01N2223/616 , H01J37/16 , H01J2237/2007 , H01J2237/201 , H01J2237/28 , H01J2237/2826
摘要： A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
摘要翻译： 样品架组件包括样品托盘，基板，载物台和安装在载物台上的校准标准品。 底板底部的三个配合结构与安装在扫描电镜样品台上的台架上的相应结构配合。 可选的接触导体提供台架和基板之间的电接触，使得通过电子束在样品上产生的电荷可以使样品通过样品导电层到样品托盘，到基板，到载物台， 并通过接地阶段。
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