发明申请
- 专利标题: HOLDER FOR MEASUREMENT AND MEASUREMENT APPARATUS
- 专利标题(中): 用于测量和测量的装置
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申请号: US13664763申请日: 2012-10-31
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公开(公告)号: US20130106458A1公开(公告)日: 2013-05-02
- 发明人: Motoshi SETO , Hiroaki Murakami , Kazuhiro Ilzuka
- 申请人: Motoshi SETO , Hiroaki Murakami , Kazuhiro Ilzuka
- 优先权: JP2011-239636 20111031
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
A holder for measurement configured to be capable of holding an object of measurement, the object of measurement included a package including a plurality of semiconductor chips and a conduction portion exposed to the outside through a lateral surface of the package, including: a support board including a through-hole; a fixation portion configured to fix the object of measurement to the support board; and a probe portion movable in at least one axial direction with respect to the support board, and configured to be capable of coming into contact with the conduction portion.
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