发明申请
- 专利标题： BRUSH BOX MODULE FOR CHEMICAL MECHANICAL POLISHING CLEANER
- 专利标题（中）： 用于化学机械抛光清洁剂的刷盒
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申请号： US13291945申请日： 2011-11-08
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公开(公告)号： US20130111678A1公开(公告)日： 2013-05-09
- 发明人: Hui Chen , Allen L. D'Ambra , Lakshmanan Karuppiah , Thomas H. Osterheld
- 申请人： Hui Chen , Allen L. D'Ambra , Lakshmanan Karuppiah , Thomas H. Osterheld
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; A46B13/00
摘要：
Embodiments of the invention generally relate to a method and apparatus for cleaning a substrate. Particularly, embodiments of the invention relate to an apparatus and method for cleaning a substrate using a scrub brush. One embodiment provides a brush box assembly for cleaning a substrate. The assembly comprises a chamber body having a cleaning chamber disposed therein, a rotatable chuck disposed in the cleaning chamber, and an edge cleaner module positioned adjacent the chuck.
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