发明申请
- 专利标题: RESISTANCE CHANGE ELEMENT AND MANUFACTURING METHOD THEREFOR
- 专利标题(中): 电阻变化元件及其制造方法
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申请号: US13810708申请日: 2012-01-18
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公开(公告)号: US20130112936A1公开(公告)日: 2013-05-09
- 发明人: Zhiqiang WEI , Takeshi Takagi , Satoru Mitani , Yoshio Kawashima , Ichirou Takahashi
- 申请人: Zhiqiang WEI , Takeshi Takagi , Satoru Mitani , Yoshio Kawashima , Ichirou Takahashi
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 优先权: JP2011-010122 20110120
- 国际申请: PCT/JP2012/000287 WO 20120118
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A variable resistance element including: a first electrode; a second electrode; and a variable resistance layer having a resistance value which reversibly changes according to electrical signals applied, wherein the variable resistance layer includes a first variable resistance layer comprising a first oxygen-deficient transition metal oxide, and a second variable resistance layer comprising a second transition metal oxide having a degree of oxygen deficiency lower than a degree of oxygen deficiency of the first transition metal oxide layer, the second electrode has a single needle-shaped part at the interface with the second variable resistance layer, and the second variable resistance layer is interposed between the first variable resistance layer and the second electrode, is in contact with the first variable resistance layer and the second electrode, and covers the needle-shaped part.
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