Invention Application
- Patent Title: SEMICONDUCTOR DEVICE HAVING VERTICAL CHANNEL TRANSISTOR AND METHODS OF FABRICATING THE SAME
- Patent Title (中): 具有垂直通道晶体管的半导体器件及其制造方法
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Application No.: US13724799Application Date: 2012-12-21
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Publication No.: US20130113029A1Publication Date: 2013-05-09
- Inventor: Hyung-woo Chung , Yong-chul OH , Yoo-sang HWANG , Gyo-young JIN , Hyeong-sun HONG , Dae-ik KIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2010-0047646 20100520
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device includes a first pair of pillars extending from a substrate to form vertical channel regions, the first pair of pillars having a first pillar and a second pillar adjacent to each other, the first pillar and the second pillar arranged in a first direction, a first bit line disposed on a bottom surface of a first trench formed betweenthe first pair of pillars, the first bit line extending in a second direction that is substantially perpendicular to the first direction, a first contact gate disposed on a first surface of the first pillar with a first gate insulating layer therebetween, a second contact gate disposed on a first surface of the second pillar with a second gate insulating layer therebetween, the first surface of the first pillar and the first surface of the second pillar face opposite directions, and a first word line disposed on the first contact gate and a second word line disposed on the second contact gate, the word lines extending in the first direction.
Public/Granted literature
- US08785998B2 Semiconductor device having vertical channel transistor and methods of fabricating the same Public/Granted day:2014-07-22
Information query
IPC分类: