发明申请
- 专利标题: Semiconductor Device and Method of Forming a Metallurgical Interconnection Between a Chip and a Substrate in a Flip Chip Package
- 专利标题(中): 半导体器件和在倒装芯片封装中形成芯片和衬底之间的冶金互连的方法
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申请号: US13268048申请日: 2011-10-07
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公开(公告)号: US20130113093A9公开(公告)日: 2013-05-09
- 发明人: Nazir Ahmad , Young-Do Kweon , Samuel Tam , Kyung-Moon Kim , Rajendra D. Pendse
- 申请人: Nazir Ahmad , Young-Do Kweon , Samuel Tam , Kyung-Moon Kim , Rajendra D. Pendse
- 申请人地址: SG Singapore
- 专利权人: STATS CHIPPAC, LTD.
- 当前专利权人: STATS CHIPPAC, LTD.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/60
摘要:
A method for forming metallurgical interconnections and polymer adhesion of a flip chip to a substrate includes providing a chip having a set of bumps formed on a bump side thereof and a substrate having a set of interconnect points on a metallization thereon, providing a measured quantity of a polymer adhesive in a middle region of the chip on the bump side, aligning the chip with the substrate so that the set of bumps aligns with the set of interconnect points, pressing the chip and the substrate toward one another so that a portion of the polymer adhesive contacts the substrate and the bumps contact the interconnect points, and heating the bumps to a temperature sufficiently high to form a metallurgical connection between the bumps and the interconnect points.
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