发明申请
US20130115416A1 CERAMIC MEMBER, PROBE HOLDER, AND MANUFACTURING METHOD OF CERAMIC MEMBER
有权
陶瓷会员，探头架，以及陶瓷会员的制造方法
- 专利标题： CERAMIC MEMBER, PROBE HOLDER, AND MANUFACTURING METHOD OF CERAMIC MEMBER
- 专利标题（中）： 陶瓷会员，探头架，以及陶瓷会员的制造方法
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申请号： US13809290申请日： 2011-07-13
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公开(公告)号： US20130115416A1公开(公告)日： 2013-05-09
- 发明人: Akira Nakamura , Kohei Suzuki , Shinya Miyaji , Shinji Saito
- 申请人： Akira Nakamura , Kohei Suzuki , Shinya Miyaji , Shinji Saito
- 申请人地址： JP Yokohama-shi
- 专利权人： NHK SPRING CO., LTD.
- 当前专利权人： NHK SPRING CO., LTD.
- 当前专利权人地址： JP Yokohama-shi
- 优先权： JP2010-160059 20100714
- 国际申请： PCT/JP2011/066009 WO 20110713
- 主分类号： C04B35/583
- IPC分类号： C04B35/583 ; C04B35/645
摘要：
There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member.
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