发明申请
- 专利标题: RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- 专利标题(中): 耐蚀组合物和形成耐力图案的方法
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申请号: US13667237申请日: 2012-11-02
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公开(公告)号: US20130115555A1公开(公告)日: 2013-05-09
- 发明人: Hiroaki Shimizu , Tsuyoshi Nakamura , Jiro Yokoya , Hideto Nito
- 申请人: Tokyo Ohka Kogyo Co., Ltd.
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2011-245873 20111109; JP2012-140216 20120621
- 主分类号: C08F226/06
- IPC分类号: C08F226/06 ; G03F7/20 ; G03F7/004
摘要:
There are provided a method of forming a resist pattern includes: a step (1) in which a resist composition containing a base component (A) that generates base upon exposure and exhibits increased solubility in an alkali developing solution by the action of acid is applied to a substrate to form a resist film; a step (2) in which the resist film 2 is subjected to exposure; a step (3) in which baking is conducted after the step (2); and a step (4) in which the resist film 2 is subjected to an alkali development, thereby forming a negative-tone resist pattern in which the unexposed portion 2b of the resist film 2 has been dissolved and removed, and the resist composition used in the step (1).
公开/授权文献
- US09029070B2 Resist composition and method of forming resist pattern 公开/授权日:2015-05-12
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