发明申请
US20130115555A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN 有权
耐蚀组合物和形成耐力图案的方法

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
摘要:
There are provided a method of forming a resist pattern includes: a step (1) in which a resist composition containing a base component (A) that generates base upon exposure and exhibits increased solubility in an alkali developing solution by the action of acid is applied to a substrate to form a resist film; a step (2) in which the resist film 2 is subjected to exposure; a step (3) in which baking is conducted after the step (2); and a step (4) in which the resist film 2 is subjected to an alkali development, thereby forming a negative-tone resist pattern in which the unexposed portion 2b of the resist film 2 has been dissolved and removed, and the resist composition used in the step (1).
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