发明申请
US20130115735A1 Apparatus and Methods for Molded Underfills in Flip Chip Packaging
有权
倒装芯片包装中模制底层填料的设备和方法
- 专利标题: Apparatus and Methods for Molded Underfills in Flip Chip Packaging
- 专利标题(中): 倒装芯片包装中模制底层填料的设备和方法
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申请号: US13289719申请日: 2011-11-04
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公开(公告)号: US20130115735A1公开(公告)日: 2013-05-09
- 发明人: Meng-Tse Chen , Hsiu-Jen Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
- 申请人: Meng-Tse Chen , Hsiu-Jen Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/98
- IPC分类号: H01L21/98 ; B29C35/08
摘要:
Methods and apparatus for a forming molded underfills. A method is disclosed including loading a flip chip substrate into a selected one of the upper mold chase and lower mold chase of a mold press at a first temperature; positioning a molded underfill material in the at least one of the upper and lower mold chases while maintaining the first temperature which is lower than a melting temperature of the molded underfill material; forming a sealed mold cavity and creating a vacuum in the mold cavity; raising the temperature of the molded underfill material to a second temperature greater than the melting point to cause the molded underfill material to flow over the flip chip substrate forming an underfill layer and forming an overmolded layer; and cooling the flip chip substrate to a third temperature substantially lower than the melting temperature of the molded underfill material. An apparatus is disclosed.
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