发明申请
- 专利标题： COOLED CHARGED PARTICLE SYSTEMS AND METHODS
- 专利标题（中）： 冷却充气颗粒系统和方法
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申请号： US13487433申请日： 2012-06-04
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公开(公告)号： US20130118184A1公开(公告)日： 2013-05-16
- 发明人: Alexander Groholski , Shawn McVey , Mark D. DiManna , Brian M. Bassett , Richard Comunale , Louise Barriss , Colin A. Sanford , John Notte IV
- 申请人： Alexander Groholski , Mark D. DiManna , Brian M. Bassett , Louise Barriss , Colin A. Sanford , John Notte IV
- 申请人地址： US MA Peabody
- 专利权人： CARL ZEISS NTS, LLC
- 当前专利权人： CARL ZEISS NTS, LLC
- 当前专利权人地址： US MA Peabody
- 主分类号： F17C13/02
- IPC分类号： F17C13/02
摘要：
Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
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