发明申请
- 专利标题: MEMS TUNNELING ACCELEROMETER
- 专利标题(中): MEMS隧道式加速度计
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申请号: US13736853申请日: 2013-01-08
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公开(公告)号: US20130118257A1公开(公告)日: 2013-05-16
- 发明人: Hector J. De Los Santos , Farrokh Mohamadi
- 申请人: TiaLinx, Inc.
- 申请人地址: US CA Irvine
- 专利权人: TiaLinx, Inc.
- 当前专利权人: TiaLinx, Inc.
- 当前专利权人地址: US CA Irvine
- 主分类号: G01P15/08
- IPC分类号: G01P15/08
摘要:
A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration.
公开/授权文献
- US08746067B2 MEMS tunneling accelerometer 公开/授权日:2014-06-10