公开(公告)号：US20130118257A1

公开(公告)日：2013-05-16

申请号：US13736853

申请日：2013-01-08

Applicant: TiaLinx, Inc.

Inventor： Hector J. De Los Santos ,  Farrokh Mohamadi

IPC: G01P15/08

CPC classification number: G01P15/08 ,  G01P15/0802 ,  G01P15/0894 ,  G01P2015/0814 ,  G01P2015/088

Abstract: A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration.

Abstract translation: 隧道加速度计包括相对于盖晶片横向移动的检验质量块。 检测质量块或盖片晶片都包括多个隧道尖端，使得剩余的一个检测质量块和盖片晶片包括相应的多个对电极。 因此，隧道尖端和对置电极之间流动的隧穿电流将随着检测质量响应于所施加的加速度而横向移位而变化。

公开(公告)号：US08746067B2

公开(公告)日：2014-06-10

申请号：US13736853

申请日：2013-01-08

Applicant: TiaLinx, Inc.

Inventor： Hector J. De Los Santos ,  Farrokh Mohamadi

IPC: G01P15/08

CPC classification number: G01P15/08 ,  G01P15/0802 ,  G01P15/0894 ,  G01P2015/0814 ,  G01P2015/088

Abstract: A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration.

Abstract translation: 隧道加速度计包括相对于盖晶片横向移动的检验质量块。 检测质量块或盖片晶片都包括多个隧道尖端，使得剩余的一个检测质量块和盖片晶片包括相应的多个对电极。 因此，隧道尖端和对置电极之间流动的隧穿电流将随着检测质量响应于所施加的加速度而横向移位而变化。