发明申请
US20130120863A1 SUBSTRATES FOR MIRRORS FOR EUV LITHOGRAPHY AND THEIR PRODUCTION
有权
用于EUV光刻及其生产的镜子的基底
- 专利标题: SUBSTRATES FOR MIRRORS FOR EUV LITHOGRAPHY AND THEIR PRODUCTION
- 专利标题(中): 用于EUV光刻及其生产的镜子的基底
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申请号: US13667862申请日: 2012-11-02
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公开(公告)号: US20130120863A1公开(公告)日: 2013-05-16
- 发明人: Julian KALLER , Wilfried CLAUSS , Michael GERHARD
- 申请人: CARL ZEISS SMT GMBH
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT GMBH
- 当前专利权人: CARL ZEISS SMT GMBH
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102010028488.2 20100503
- 主分类号: G02B5/08
- IPC分类号: G02B5/08 ; C03C14/00
摘要:
For the production of mirrors for EUV lithography, substrates are suggested having a mean relative thermal longitudinal expansion of no more than 10 ppb across a temperature difference ΔT of 15° C. and a zero-crossing temperature in the range between 20° C. and 40° C. For this purpose, at least one first and one second material having low thermal expansion coefficients and opposite gradients of the relative thermal expansion as a function of temperature are selected and a substrate is produced by mixing and bonding these materials.
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